HITACHI S-4800 FIELD EMISSION SCANNING ELECTRON MICROSCOPE (FE-SEM)
Location: Egan Research Center, Room 106
Status: Operational
Booking: Through Priority Software® FBS
Description: Hitachi S-4800 FE-SEM is a high-resolution scanning electron microscope (SEM) with cold field emission gun. It is equipped with the energy-dispersive X-ray spectroscopy (EDS) system (EDAX detector and Team software) that enables elemental analysis. It also has a Nabity nanolithography e-beam pattern generation system.
Instrument Specifications:
| Electron Source | Cold Field Emission Gun |
|---|---|
| Accelerating Voltage | 500V to 30kV in 100V steps |
| Resolution | 1.0 nm Accelerating Voltage 15kV, Working Distance 4 mm 2.0 nm Accelerating Voltage 1kV, Working Distance 1.5 mm |
| Magnification | High Mag Mode 100x to 800,000x Low Mag Mode 30x to 2,000x |
| Specimen Stage | X Traverse 0 to 110 mm Y Traverse 0 to 110 mm Z Traverse 1.5 to 40 mm Tilt -5° to +70° Rotation 360° |
| Specimen Size | Max. 150 mm (6″) |
| Image Mode | Secondary Electron Imaging Back Scattering Electron Imaging |
| Accessories | Energy-dispersive X-ray Spectroscopy System Nabity Nanolithography e-beam Pattern Generation System |
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TESCAN VEGA 3 LMU VARIABLE PRESSURE SCANNING ELECTRON MICROSCOPE (VP-SEM)
Location: TBD
Status: Relocation In Progress
Booking: NA
Description: TESCAN VEGA 3 LMU variable pressure scanning electron microscope (VP-SEM) is suitable for ultra-high-resolution electron imaging of solid or semi-liquid samples. It is equipped with an Oxford energy dispersive spectrometer (EDS) for sub-micron spatial resolution elemental analysis and an Oxford electron backscatter diffraction (EBSD) system for in situ mineralogical and crystallographic analysis of biomineralized structures. The system also supports rapid mapping of elemental composition and crystallographic orientations.